The Auriga Zeiss SEM combines a high resolution SEM to the precision milling and nanofabrication abilities of a high resolution FIB. It includes unique imaging capabilities, detection of topographical and compositional information, analysis of non-conducting materials, innovative FIB technology with resolution (<2.5 nm) and gas processing technology for ion and e-beam assisted etching and deposition.
We are interested in cross-disciplinary collaborations.